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Pure Appl. Chem.
76(6), 1161-1213, 2004
Pure and Applied
Vol. 76, Issue 6
Critical evaluation of the state of the art of the analysis of light
elements in thin films demonstrated using the examples of SiOXNY
and AlOXNY films (IUPAC Technical Report)
S. Dreer* and
Abstract: The quantitative analysis of thin films containing
light elements is very important in improving the coating processes
and technological properties of the products. In order to review the
state of the art of modern analytical techniques for such applications,
the model systems SiOXNY and AlOXNY were
selected. Over 1000 abstracts were screened, and the relevant literature
was evaluated to give a comprehensive overview of instruments, analytical
procedures and results, film types, deposition methods, and investigation
goals. From more than 150 citations, the limitations, drawbacks, and
pitfalls of the different methods were extracted and reviewed critically,
while in addition, improvements were proposed where possible. These
suggestions are combined with the newest results of investigation by
the authors of this paper. Recommendations concerning the optimized
combination of analytical methods for different analytical problems
have been worked out on the basis of all results. Analysis of various
multicomponent systems containing light elements demonstrated the applicability
of the different methods of analysis in combination to all film systems
with related compositions.
* Corresponding author.
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